Specifications:

• Resolution : 1.0 nm at 15 kV , 1.8 nm at 1 kV
• Acclerating Voltage: 500 V - 30 kV
• Probe Current : 0.2 pA - 22 nA
• 5-axis motorized stage: X = 150 mm, Y = 150 mm, Z = 50 mm, T = -10° -- 60°, R =n x 360°

Detectors:

• In-lens SE detector (TLD-SE)
• In-lens BSE detector (TLD-BSE)
• Everhardt-Thornley SED
• TV-rate Solid-State BSED
• EDAX detector
• Gatan monCL Cathodoluminescence detector