This course includes four main computational exercises on thermodynamics, plasma chemistry, transport and crystal growth modeling using commercial packages -CHEMKIN III, CFDRC and SAMPR. CHEMKIN III is licensed from Reaction Design, Inc. SAMPR is licensed from NASA Ames Research Center. CFDRC is a commercial package licensed from CFDRC, Inc. The exercises using CHEMKIN III are based on our own research results, i.e., diamond deposition prediction based on radical species. The exercises using CFDRC and SAMPR dwell on the reaction kinetics and transport phenomena in plasma reactors. In addition, our research using kMC simulations are used as illustrations for teaching concepts on surface chemistry during crystal growth.

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