Autoprobe M5 and CP Atomic Force Microscopes (AFM). The M5 AFM has a large, self-actuating sample stage with ~30cm of lateral motion in X and Y. The tube scanner gives a 100 um square maximum scan size and ~10nm resolution. The CP AFM has manual sample stage motion but with finer resolution on the order of 1-5nm. Both run on the same, easy to use, software produced by Veeco Metrology Inc.